Apparatus for image transfer with charged particle beam, and def

Details Apparatus for image transfer with charged particle beam, and def Apparatus for image transfer with charged particle beam, and def

1995-10-26

1997-11-18

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250398, H01J 3730

Patent

active

056891172

ABSTRACT:
An image transferring apparatus using a charged particle beam comprising a projection lens for transferring a pattern formed on a mask onto a target by focusing a charged particle beam passing perpendicularly through the mask, and a deflector for deflecting the charged particle beam passing through the mask toward a predetermined direction (x-axis direction) so that a transfer position of the pattern to the target is changed. In this apparatus, the deflector comprises a deflection coil for generating a deflection magnetic field extending in a direction (y-axis direction) perpendicular to the predetermined direction, and correction coils for generating correction magnetic fields extending in the same direction as the deflection magnetic field at areas spaced apart from the center of the deflection magnetic field along the direction (x-axis direction) perpendicular to the direction of the deflection magnetic field.

REFERENCES:
patent: 5079112 (1992-01-01), Berger et al.
patent: 5130213 (1992-07-01), Berger et al.
patent: 5258246 (1993-11-01), Berger et al.
patent: 5260151 (1993-11-01), Berger et al.
patent: 5279925 (1994-01-01), Berger et al.
patent: 5334282 (1994-08-01), Nakayama et al.
patent: 5382800 (1995-01-01), Nishino et al.
patent: 5523580 (1996-06-01), Davis
U.S. Serial No. 08/310,958 filed Sep. 23, 1994.

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