Apparatus for doping a semiconductor crystalline rod

Details Apparatus for doping a semiconductor crystalline rod Apparatus for doping a semiconductor crystalline rod

1975-08-11

1977-09-13

Smith, Alfred E.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250456, B01J 1734

Patent

active

040485080

ABSTRACT:
An apparatus for doping a semiconductor crystalline rod by nuclear or radiogenic reactions comprised of a hollow irradiation housing having axially and rotatably movable rod support means within the chamber thereof and a neutron conductive sleeve connected with the housing and providing communication between a neutron source and the housing chamber. Accurate and controlled doping of a semiconductor crystalline rod mounted on the rod support means within the housing chamber occurs via controlled rod movement in relation to the neutron source.

REFERENCES:
patent: 757806 (1904-04-01), Giersiepen
patent: 1574884 (1926-03-01), Hendricks
patent: 2087751 (1937-07-01), Buttolph
patent: 3132251 (1964-05-01), Maud et al.

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