Apparatus for detecting registration marks on a target such as a

Details Apparatus for detecting registration marks on a target such as a Apparatus for detecting registration marks on a target such as a

1976-10-12

1977-11-01

Church, Craig E.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250492A, H01J 3700

Patent

active

040567303

ABSTRACT:
A square shaped beam of charged particles is passed over a registration mark in the surface of a semiconductor wafer. A signal produced by a diode detector that is responsive to backscattered electrons will peak when the beam passes over each of the edges of the registration mark. The signal is differentiated; and the resultant signal is filtered and amplified to provide information regarding the position of the beam with respect to the wafer. If more than one diode detector is used, the signals are added just before or just after the differentiation.

REFERENCES:
patent: 3875415 (1975-04-01), Woodard
patent: 3901814 (1975-08-01), Davis

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