Apparatus for holding an object by use of electrostatic attracti

Details Apparatus for holding an object by use of electrostatic attracti Apparatus for holding an object by use of electrostatic attracti

1986-02-19

1987-05-19

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

2504401, 2504421, 361234, H01J 3720, H02N 1300

Patent

active

046671102

ABSTRACT:
An apparatus for releasably holding an object on an electrically insulative member by use of an electrostatic attracting force which is produced by dielectrically polarizing the insulative member, wherein the apparatus includes a photoconductive layer having photoconductivity and is provided on at least one of a surface of the insulative member facing the object and a reverse surface of the insulative member, and a light source for producing a light beam to irradiate the photoconductive layer with the light beam, thereby to decrease the attracting force to be applied to the object.

REFERENCES:
patent: 3993509 (1976-11-01), McGinty
patent: 4163168 (1979-07-01), Ishikawa et al.
patent: 4412133 (1983-10-01), Eckes et al.

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