Apparatus for image transfer with charged particle beam, and def

Details Apparatus for image transfer with charged particle beam, and def Apparatus for image transfer with charged particle beam, and def

1997-06-10

1998-11-03

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250396ML, H01J 37302, H01J 37147

Patent

active

058312749

ABSTRACT:
A image transferring apparatus using a charged particle beam including a projection lens for transferring a pattern formed on a mask onto a target by focusing a charged particle beam passing through the mask, and a deflector for deflecting the charged particle beam passing through the mask toward a predetermined direction (x-axis direction) so that a transfer position of the pattern to the target is changed. In this apparatus, the deflector includes a deflection coil for generating a deflection magnetic field extending in a direction (y-axis direction) perpendicular to the predetermined direction, and correction coils for generating correction magnetic fields extending in the same direction as the deflection magnetic field at areas spaced apart from the center of the deflection magnetic field along the direction (x-axis direction) perpendicular to the direction of the deflection magnetic field.

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patent: 5382800 (1995-01-01), Nishino et al.
patent: 5523580 (1996-06-01), Davis

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