Maskless particle-beam system for exposing a pattern on a...

Maskless photon-electron spot-grid array printer

Maskless reflection electron beam projection lithography

Matching dose and energy of multiple ion implanters

Means to establish orientation of ion beam to wafer and...

Means to establish orientation of ion beam to wafer and...

Measurement method of electron beam current, electron beam...

Measurement of proximity effects in electron beam lithography

Measuring apparatus for degree of spin polarization of an electr

Measuring method and apparatus, exposure method and...

Measuring plasma uniformity in-situ at wafer level

Mechanism for preventing metallic ion contamination of a wafer i

Mechanism for prevention of neutron radiation in ion...

Mechanized retractable pellicles and methods of use

Memory device utilizing ion beam readout

MEMS-based two-dimensional e-beam nano lithography device...

Method and a device for implantation of particles into a substra

Method and apparatus for adjustably supporting a light...

Method and apparatus for altering material

Method and apparatus for altering material