Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2005-08-22
2008-09-16
Berman, Jack I. (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S492100, C250S492200, C250S492300, C250S397000
Reexamination Certificate
active
07425714
ABSTRACT:
A technology capable of reducing the influence of the noise overlapped in a long transmission line when accurately measuring weak beam current in an electron beam writing system and capable of accurately and efficiently measuring weak beam current in a beam writing system using multiple beams is provided. With using a switch for connecting and disconnecting an electron beam detecting device and a detected signal line, the electron beam detecting device is disconnected from the detected signal line to accumulate the detected signals in the electron beam detecting device during the beam current measurement. Simultaneously with the finish of the measurement, the electron beam detecting device and the detected signal line are connected to measure the accumulated signals. Also, in order to simultaneously perform the measurement method, a plurality of electron beam detecting devices and switches are used to simultaneously measure a plurality of electron beams with high accuracy.
REFERENCES:
patent: 5117111 (1992-05-01), Nakamura et al.
patent: 6768324 (2004-07-01), Yamada et al.
patent: 6943507 (2005-09-01), Winkler et al.
patent: 6946857 (2005-09-01), Yamada et al.
patent: 6975125 (2005-12-01), Yamada et al.
patent: 7138629 (2006-11-01), Noji et al.
patent: 2004/0207415 (2004-10-01), Yamada et al.
patent: 2004/0239347 (2004-12-01), Yamada et al.
patent: 2004/0256556 (2004-12-01), Winkler et al.
patent: 2007/0023659 (2007-02-01), Sergeevich et al.
patent: 02-208593 (1989-02-01), None
patent: 05-299328 (1992-04-01), None
patent: 3082662 (1996-03-01), None
patent: 2003-051437 (2001-08-01), None
patent: 2004-055933 (2002-07-01), None
Nakayama Yoshinori
Ohta Hiroya
Sakakibara Makoto
Sohda Yasunari
Someda Yasuhiro
A. Marquez, Esq. Juan Carlos
Berman Jack I.
Canon Kabushiki Kaisha
Fisher Esq. Stanley P.
Hitachi High-Technologies Corporation
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