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Swinging objective retarding immersion lens electron optics...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Swinging objective retarding immersion lens electron optics...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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System and method for accurate positioning of a scanning...

Radiant energy – Inspection of solids or liquids by charged particles
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System and method for automatic analysis of defect material...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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System and method for constructing a profile of a structure...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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System and method for cooling workpieces processed by an ion imp

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
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System and method for determining a cross sectional feature...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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System and method for directing a miller

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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System and method for electron beam irradiation

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
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System and method for electron beam irradiation

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
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System and method for electron-beam lithography

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
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System and method for focused ion beam data analysis

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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System and method for inspecting a semiconductor sample

Radiant energy – Inspection of solids or liquids by charged particles – Methods
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System and method for inspecting a semiconductor sample

Radiant energy – Inspection of solids or liquids by charged particles – Methods
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System and method for measuring dimensions of a feature...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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System and method for processing an object

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
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System and method for semiconductor processing using polarized r

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent

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System and method for voltage contrast analysis of a wafer

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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System and method of composition correction for beta gauges

Radiant energy – Inspection of solids or liquids by charged particles – Including a radioactive source
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System for analyzing surfaces of samples

Radiant energy – Inspection of solids or liquids by charged particles
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