Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2005-11-01
2005-11-01
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S3960ML
Reexamination Certificate
active
06960766
ABSTRACT:
A swinging objective retarding immersion lens system and method therefore which provide a low voltage electron beam with high beam current, relatively high spatial resolution, a relative large scan field, and high signal collection efficiency. The objective lens includes a magnetic lens for generating a magnetic field in the vicinity of the specimen to focus the particles of the particle beam on the specimen, an electrode having a potential for providing a retarding field to the particle beam near the specimen to reduce the energy of the particle beam when the beam collides with the specimen; a deflection system including a plurality of deflection units situated along the beam axis for deflecting the particle beam to allow scanning on the specimen with large area, at least one of the deflection units located in the retarding field of the beam, the remainder of the deflection units located within the central bore of the magnetic lens; and a annular detection unit with a relatively small aperture, located underneath the primary beam define aperture, to capture secondary electron (SE) and backscattered electrons (BSE).
REFERENCES:
patent: 4219732 (1980-08-01), Nakagawa et al.
patent: 4785176 (1988-11-01), Frosien et al.
patent: 4823005 (1989-04-01), Garth
patent: 4896036 (1990-01-01), Rose et al.
patent: 4945246 (1990-07-01), Davis et al.
patent: 5023457 (1991-06-01), Yonezawa
patent: 5241176 (1993-08-01), Yonezawa
patent: 5424541 (1995-06-01), Todokoro et al.
patent: 5563415 (1996-10-01), Crewe
patent: 5614833 (1997-03-01), Golladay
patent: 5719402 (1998-02-01), Satoh et al.
patent: 5780859 (1998-07-01), Feuerbaum et al.
patent: 6037589 (2000-03-01), Yonezawa et al.
patent: 6194729 (2001-02-01), Weimer
patent: 6218664 (2001-04-01), Krans et al.
patent: 6392231 (2002-05-01), Chen
patent: 6605805 (2003-08-01), Chen
patent: 6617587 (2003-09-01), Parker et al.
Chen et al., “The optical properties of “Swinging Objective Lens” in a combined magnetic lens and deflection system with superimposed field”, Optik, vol. 64, No. 4 (1983), pp. 341-347.
Chen et al., “Nanowriter: A new high-voltage electron beam lithography system for nanometer-scale fabrication”, Journal of Vacuum Science and Technology B, vol. 6, No. 6 (Nov/Dec 1988), pp. 2009-2013.
Berman Jack I.
Hermes-Microvision, Inc.
Townsend and Townsend / and Crew LLP
LandOfFree
Swinging objective retarding immersion lens electron optics... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Swinging objective retarding immersion lens electron optics..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Swinging objective retarding immersion lens electron optics... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3491155