System and method for inspecting a semiconductor sample

Details System and method for inspecting a semiconductor sample System and method for inspecting a semiconductor sample

2008-04-01

2008-04-01

Lee, John R. (Department: 2878)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S310000

Reexamination Certificate

active

07351967

ABSTRACT:
The present invention relates to a system and method of inspecting a semiconductor sample. A plurality of scans of the semiconductor sample are recorded. Each of the scans comprises a spatially resolved measurement of a property of interest. At least one cross-correlation is calculated between at least two of the plurality of scans. For each of the plurality of scans, a respective shift value is calculated based on the at least one cross-correlation. The scans are superimposed with each other. In the superposition, each of the scans is shifted by the respective shift value. The shift values can be adapted to compensate a drift of the semiconductor sample which occurs while the scans are recorded. Hence, the present invention helps overcome problems caused by the drift.

REFERENCES:
patent: 5048103 (1991-09-01), Leclerc et al.
patent: 5077473 (1991-12-01), Elings et al.
patent: 6184524 (2001-02-01), Brink et al.
patent: 6448555 (2002-09-01), Hosokawa
patent: 6774362 (2004-08-01), Katagami et al.
patent: 6888139 (2005-05-01), Tsuneta et al.
patent: 7127126 (2006-10-01), Sakai et al.
patent: 7197168 (2007-03-01), Russo
patent: 2002/0034338 (2002-03-01), Askary
patent: 2002/0199164 (2002-12-01), Sengupta et al.
patent: 2003/0201393 (2003-10-01), Tsuneta et al.
patent: 2005/0056784 (2005-03-01), Subramaniam

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