Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1996-11-26
1998-10-27
Anderson, Bruce
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
25044211, G01N 2100, G21K 510
Patent
active
058280707
ABSTRACT:
A system and method for conductively and/or convectively transferring heat away from a workpiece that has been processed by a processing system, such as an ion implantation system. The conductive transfer of heat from the workpiece is effectuated by disposing the workpiece in relatively close proximity with a floor of a loadlock, which is maintained at a relatively cool temperature. The chamber pressure is disposed at a selected pressure by a pressure regulator and a vacuum pressure is applied to the backside of the workpiece closest to draw the workpiece into contact with the chamber floor, thereby effecting heat transfer from the workpiece to the cooling surface.
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Blake Julian G.
Brailove Adam A.
Purser Kenneth H.
Rose Peter H.
Yang Zhongmin
Anderson Bruce
Eaton Corporation
Engellenner Thomas J.
Laurentano Anthony A.
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