T-shaped electron-beam microcolumn as a general purpose scanning

Details T-shaped electron-beam microcolumn as a general purpose scanning T-shaped electron-beam microcolumn as a general purpose scanning

1998-03-03

2000-02-08

Westin, Edward P.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 314, G21K 700

Patent

active

060230606

ABSTRACT:
A charged particle-beam microcolumn, which for example may be used for charged particle microscopy, with a T-shape configuration has a relatively narrow base structure supporting the beam forming charged particle optical column. The narrow base structure permits the T-shaped microcolumn and sample to be positioned at an angle other than normal with respect to each other, which allows generation of three-dimensional-like images of the sample surface. Thus, the incidence angle of the charged particle beam generated by the T-shaped microcolumn may be varied while a short working distance is maintained. A conventional secondary/backscattered charged particle detector may be used because the reflected angle of the charged particles allows a charged particle detector to be separated from the T-shaped microcolumn. Further, the small size of the T-shaped microcolumn permits observation of different parts of a large stationary sample by moving the T-shaped microcolumn with respect to the sample. Moreover, multiple T-shaped microcolumns may be arrayed to improve throughput.

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