TEM with aberration corrector and phase plate

Details TEM with aberration corrector and phase plate TEM with aberration corrector and phase plate

2011-03-29

2011-03-29

Souw, Bernard E (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S311000, C250S307000

Reexamination Certificate

active

07915584

ABSTRACT:
The invention relates to a TEM with a corrector (330) to improve the image quality and a phase plate (340) to improve contrast. The improved TEM comprises a correction system completely placed between the objective lens and the phase plate, and uses the lenses of the corrector to form a magnified image of the diffraction plane on the phase plate.

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