Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2008-04-29
2008-04-29
Vanore, David A. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S311000, C250S492100, C250S492200, C250S492300, C382S103000, C382S145000, C382S153000, C324S754120
Reexamination Certificate
active
07365324
ABSTRACT:
A system for further enhancing speed, i.e. improving throughput in a SEM-type inspection apparatus is provided. An inspection apparatus for inspecting a surface of a substrate produces a crossover from electrons emitted from an electron beam source25•1, then forms an image under a desired magnification in the direction of a sample W to produce a crossover. When the crossover is passed, electrons as noises are removed from the crossover with an aperture, an adjustment is made so that the crossover becomes a parallel electron beam to irradiate the substrate in a desired sectional form. The electron beam is produced such that the unevenness of illuminance is 10% or less. Electrons emitted from the sample W are detected by a detector25•11.
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Hatakeyama Masahiro
Karimata Tsutomu
Kimba Toshifumi
Murakami Takeshi
Noji Nobuharu
Ebara Corporation
Souw Bernard
Vanore David A.
Westerman, Hattori, Daniels & Adrian , LLP.
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