Testing apparatus using charged particles and device...

Details Testing apparatus using charged particles and device... Testing apparatus using charged particles and device...

2008-03-11

2010-06-22

Souw, Bernard E (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S311000, C250S492300, C382S147000, C382S149000, C324S754120

Reexamination Certificate

active

07741601

ABSTRACT:
A system for further enhancing speed, i.e. improving throughput in a SEM-type inspection apparatus is provided. An inspection apparatus for inspecting a surface of a substrate produces a crossover from electrons emitted from an electron beam source25•1, then forms an image under a desired magnification in the direction of a sample W to produce a crossover. When the crossover is passed, electrons as noises are removed from the crossover with an aperture, an adjustment is made so that the crossover becomes a parallel electron beam to irradiate the substrate in a desired sectional form. The electron beam is produced such that the unevenness of illuminance is 10% or less. Electrons emitted from the sample W are detected by a detector25•11.

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Office Action dated Oct. 9, 2009 to corresponding Chinese Patent Application No. 2004800195199.
European Search Report dated Jan. 25, 2010, issued in corresponding European Patent Application No. 04729530.

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