Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1983-11-21
1986-06-24
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250397, G01N 2300
Patent
active
045969299
ABSTRACT:
In scanning electron microscopes the field established between the focusing lens housing at ground potential and the secondary emission electron detector at a positive potential attracts and carries the secondary electrons to the detector. This field is often displaced from the secondary emission source so that much of the emission is attracted to other areas of the microscope and is lost to the detector. To greatly improve detection efficiency, an electron attracting grid at a potential between that on the detector and the focusing lens housing ground reference potential is interposed between the detector and the specimen and positioned so that the new field established between grid and lens housing dips down toward the specimen surface and thus collects substantially all of the secondary emission electrons which then are attracted to higher potential on the detector.
REFERENCES:
patent: 3474245 (1969-10-01), Kimura et al.
patent: 3678384 (1972-07-01), Oatley
patent: 4355232 (1982-10-01), Todokoro et al.
patent: 4442355 (1984-04-01), Tamura et al.
Coates Vincent J.
Holmes Duane C.
Toro-Lira Guillermo L.
Anderson Bruce C.
Castle Linval B.
Nanometrics Incorporated
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