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Method of thinning an electron transparent thin film...

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Method of three-dimensional image reconstruction and...

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Methods and apparatus for improving resolution and reducing...

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Methods and apparatus for improving resolution and reducing...

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Micro column electron beam apparatus formed in low...

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Micro-manipulation method

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Microelectromechanical system assembly and testing device

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Microelectromechanical system assembly and testing device

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Microscope for non-differentiated phase image formation

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Monochromator and scanning electron microscope using the same

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Monochromator and scanning electron microscope using the same

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Multi-pitch and line calibration for mask and wafer CD-SEM...

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Observation apparatus and observation method using an...

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Optical axis adjusting apparatus for electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Particle beam apparatus for tilted observation of a specimen

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Particle beam device

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Particle beam device with a deflection system and a stigmator

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Particle detectors

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Particle-optic illuminating and imaging system with a...

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Pattern transfer mask, mask inspection method and a mask inspect

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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