Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1985-07-23
1987-09-01
Church, Craig E.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
250307, 250397, H01J 3728
Patent
active
046911030
ABSTRACT:
The scanning system of a scanning microscope for the imaging of phase structures is adapted to form a scanning pattern which is free from discontinuities. The detector is divided into a number of sub-regions with the direction of the dividing lines of the detector being adapted to the scanning pattern. The scanning pattern is notably meander-shaped and the detector is divided into four quadrants. The deflection system is digitally controlled and the microscope may be an electron microscope.
Dekkers Nicolaas H.
Le Poole Jan B.
Berman Jack I.
Church Craig E.
Miller Paul R.
U.S. Philips Corporation
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