Microscope for non-differentiated phase image formation

Details Microscope for non-differentiated phase image formation Microscope for non-differentiated phase image formation

1985-07-23

1987-09-01

Church, Craig E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250307, 250397, H01J 3728

Patent

active

046911030

ABSTRACT:
The scanning system of a scanning microscope for the imaging of phase structures is adapted to form a scanning pattern which is free from discontinuities. The detector is divided into a number of sub-regions with the direction of the dividing lines of the detector being adapted to the scanning pattern. The scanning pattern is notably meander-shaped and the detector is divided into four quadrants. The deflection system is digitally controlled and the microscope may be an electron microscope.

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