Optical axis adjusting apparatus for electron microscope

Details Optical axis adjusting apparatus for electron microscope Optical axis adjusting apparatus for electron microscope

1987-10-07

1988-11-29

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250397, H01J 3726

Patent

active

047884258

ABSTRACT:
An optical axis adjusting apparatus for an electron microscope for aligning the optical axis of a radiation lens system and the optical axis of an imaging lens system with each other is disclosed. A magnetization current of an objective lens or an accelerating voltage is changed stepwise and an image by the electron microscope is taken in for each change step. The taken-in images are integrated and averaged to produce a blurred image which is in turn stored in an image memory. While displaying this blurred image on a CRT monitor together with a cross marker, the amount of deflection of an electron beam inputted from a deflection input device for moving the cross marker in an interlocking manner is changed so that a cross point of the cross marker is positioned to coincide with a current center or voltage center recognizable from the blurred image displayed. Thereby, the cross marker is moved by an amount equal to the amount of movement of the image due to the change of the deflection amount but in a direction reverse to the direction of the image movement.

REFERENCES:
patent: 3833811 (1974-09-01), Koike et al.
patent: 3917946 (1975-11-01), Van Oostrum
patent: 3993905 (1976-11-01), Mollenstedt
patent: 4097740 (1978-06-01), Muller et al.
patent: 4451737 (1984-05-01), Isakozawa
patent: 4531057 (1985-07-01), Kobayashi
patent: 4623783 (1986-11-01), Kondo
patent: 4680469 (1987-07-01), Nomura et al.
patent: 4698503 (1987-10-01), Nomura et al.
"Observation and Recording of TEM Images Through TV-System" Kobayashi et al., Proc. XIth Cong. on Electron Microscopy, Kyoto 1986, pp. 453-454.

Affiliated with

Also associated with

Rating

Optical axis adjusting apparatus for electron microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical axis adjusting apparatus for electron microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical axis adjusting apparatus for electron microscope will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-365238