Particle beam device with a deflection system and a stigmator

Details Particle beam device with a deflection system and a stigmator Particle beam device with a deflection system and a stigmator

1976-01-05

1978-05-16

Church, Craig E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250396R, H01J 3726

Patent

active

040900770

ABSTRACT:
A particle beam device is provided with an arrangement for eliminating deflection errors having a deflection system and a stigmator. The deflection system has at least two pairs of deflection means disposed in a single plane at right angles to each other. The two deflection means of each of the pairs are disposed diametrically opposite each other and are centered with respect to the beam axis. The stigmator has at least four pairs of field generating means grouped into two systems of two pairs each and the two field generating means of each of the pairs are likewise disposed diametrically opposite each other and centered with respect to the beam axis. The two systems are disposed in the single plane at right angles to each other and are arranged so that each of the systems forms an angle of 45.degree. with the two pairs of deflection means.

REFERENCES:
patent: 3150258 (1964-09-01), Wilska
patent: 3371206 (1968-02-01), Takizawa
patent: 3453485 (1969-07-01), Herrmann
patent: 3644733 (1972-02-01), Wolff

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