Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2008-07-01
2008-07-01
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S3960ML, C250S398000
Reexamination Certificate
active
07394071
ABSTRACT:
A micro column electron beam apparatus having a reduced number of interconnections is provided. The micro column electron beam apparatus includes: a low temperature co-fired ceramic (LTCC) substrate; a plurality of deflector electrodes attached to a predetermined top portion of the LTCC substrate; a pad electrode placed at a top edge of the LTCC substrate and transmitting an external signal to the deflector electrodes; and a connection unit placed in the LTCC substrate and electrically connecting the deflector electrode and the pad electrode.
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The Novel Deflector for Multi Arrayed Microcolumn Using Microelectromechanical System (MEMS) Technology, H. Kim et al, JPN. J. Appl. Phys. vol. 42, Jun. 2003, pp. 4084-4088.
Choi Sang Kuk
Jeong Jin Woo
Kim Dae Jun
Kim Dae Yong
Kim Ho Seob
Blakely , Sokoloff, Taylor & Zafman LLP
Electronics and Telecommunications Research Institute
Smith Johnnie L
Wells Nikita
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