Particle beam device

Details Particle beam device Particle beam device

2006-09-19

2006-09-19

Berman, Jack (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S310000, C250S307000, C250S492200, C250S440110, C118S7230FI, C156S345390

Reexamination Certificate

active

07109487

ABSTRACT:
A particle beam device, in particular an electron microscope, having at least two particle beam columns and one object slide having a receiving surface for receiving an object. The particle beam device makes it possible to align the surface of the object perpendicular to the beam axes of the particle beam columns, using simple means, in an accurate and error-free manner. The object slide assumes a basic position from which it may be tilted into the position in which the first or the second beam axis is perpendicular or at least almost perpendicular to the receiving surface of the object slide. In the basic position, a normal to the receiving surface of the object slide is spatially oriented such that an angle formed between the first beam axis and the normal is greater than or equal to an angle formed between the second beam axis and the normal.

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Computer translation of JP 05041195 A (8 pages) from the Japanese Patent Office Website.
Animate CrossBeam® Tour; “LEO 1500 CrossBeam® Workstation” (1 page); www.zeiss.de (section semiconductor technology/material analysis).
Abstract for Japanese Application No. 04233149 A; publication date Aug. 21, 1992.
Abstract for Japanese Application No. 05041195 A; publication date Feb. 19, 1993.
Abstract for Japanese Application No. 04277456 A; publication date Oct. 2, 1992.

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