Particle detectors

Details Particle detectors Particle detectors

2005-05-03

2005-05-03

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S310000, C250S42300F, C250S397000, C315S111910, C313S310000

Reexamination Certificate

active

06888140

ABSTRACT:
A signal detector for detecting electrically charged particles in a gaseous medium has an electrode having a tip region for gathering charged particles. The electrode is connected to a voltage source for applying a voltage that generates electro-static field for attracting the particles to the electrode, and at least part of the tip region has a radius of curvature which is sufficiently small or (in the case of a point tip or sharp edge) infinitesimally small so as to create a localised high intensity electro-static field which defines a detection zone in which, in use, charge particles are accelerated by the electric field so as to ionise gas molecules in the zone and thus amplify the signal to be received by the detector. The received signal is supplied through an output of the detector. The detector may be provided in a sample chamber of a scanning electron microscope.

REFERENCES:
patent: 3766427 (1973-10-01), Coates et al.
patent: 5854490 (1998-12-01), Ooaeh et al.

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