Method of three-dimensional image reconstruction and...

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type

Reexamination Certificate

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C250S440110, C250S306000, C250S307000

Reexamination Certificate

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07154092

ABSTRACT:
Method of three-dimensional image reconstruction and transmission electron microscope capable of producing three-dimensional images. When a TEM image is taken at each tilt angle of a specimen, the amount of defocus Δf is switched to plural amounts Δf1, Δf2, and Δf3, in turn. When a three-dimensional image is reconstructed, image data stored in the image memory is sent to a CRT. TEM images acquired with the amounts Δf1, Δf2, and Δf3are displayed on the CRT. One optimum TEM image is selected at each tilt angle of the specimen. A three-dimensional image reconstruction circuit reconstructs a three-dimensional image based on the selected TEM images.

REFERENCES:
patent: 5278408 (1994-01-01), Kakibayashi et al.
patent: 6051834 (2000-04-01), Kakibayashi et al.
patent: 4-104445 (1992-04-01), None
patent: 4-337236 (1992-11-01), None

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