4. Optics: measuring and testing
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Lithographic apparatus and device manufacturing method with...

Optics: measuring and testing – Shape or surface configuration – By specular reflection
Reexamination Certificate

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Lithographic apparatus and method for calibrating the same

Optics: measuring and testing – Position or displacement
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Lithographic apparatus and method for calibrating the same

Optics: measuring and testing – Position or displacement – Position transverse to viewing axis
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Lithographic apparatus for step-and-scan imaging of mask pattern

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent

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Lithographic apparatus temperature compensation

Optics: measuring and testing – By light interference – For dimensional measurement
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Lithographic apparatus with disturbance correction system...

Optics: measuring and testing – By light interference – For dimensional measurement
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Lithographic apparatus with multiple alignment arrangements...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Lithographic apparatus with two-dimensional alignment...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Lithographic apparatus, analyzer plate, subassembly, method...

Optics: measuring and testing – By light interference – For dimensional measurement
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Lithographic apparatus, device manufacturing method and...

Optics: measuring and testing – By alignment in lateral direction – With light detector
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Lithographic apparatus, device manufacturing method and...

Optics: measuring and testing – By alignment in lateral direction
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Lithographic apparatus, device manufacturing method, and...

Optics: measuring and testing – Range or remote distance finding – Triangulation ranging to a point with two or more projected...
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Lithographic apparatus, device manufacturing method, and...

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Lithographic apparatus, device manufacturing method, and...

Optics: measuring and testing – By alignment in lateral direction
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Lithographic apparatus, device manufacturing method, and...

Optics: measuring and testing – By alignment in lateral direction
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Lithographic apparatus, device manufacturing method, and...

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Lithographic apparatus, device manufacturing method, and...

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Lithographic apparatus, device manufacturing method, and...

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Lithographic apparatus, device manufacturing method,...

Optics: measuring and testing – Lens or reflective image former testing
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Lithographic apparatus, interferometer and device...

Optics: measuring and testing – By light interference – For dimensional measurement
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