Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate
2004-12-27
2009-12-01
Toatley, Jr., Gregory J (Department: 2877)
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
Reexamination Certificate
active
07626701
ABSTRACT:
A lithographic apparatus has a plurality of different alignment arrangements that are used to perform an alignment measurement on the same mark(s) by: detecting a first alignment mark located on an object and producing a first alignment signal by a first detector; detecting the first mark and producing a second alignment signal by a second detector using a different alignment measurement than the first detector; receiving the first alignment signal from the first detector; calculating a first position of the at least first mark based on the first alignment signal; receiving the second alignment signal from the second detector; calculating a further first position of the at least first mark based on the second alignment signal.
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ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Stock, Jr. Gordon J
Toatley Jr. Gregory J
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