Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2008-04-01
2008-04-01
Lyons, Michael A. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07352473
ABSTRACT:
In an interferometric displacement measuring system, a correction for beamshear is made. The correction may be a polynomial of a variable proportional to the length of the optical path traversed by the measurement beam and the angle of the measurement mirror. The correction compensates for errors caused by non-planarity of the wavefront of the measurement beam.
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Adriaens Johannes Mathias Theodorus Antonius
Beems Marcel Hendrikus Maria
Van Der Pasch Engelbertus Antonius Fransiscus
ASML Netherlands B.V.
Lyons Michael A.
Pillsbury Winthrop Shaw & Pittman LLP
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