Optics: measuring and testing – Range or remote distance finding – Triangulation ranging to a point with two or more projected...
Reexamination Certificate
2006-10-10
2006-10-10
Fuller, Rodney (Department: 2851)
Optics: measuring and testing
Range or remote distance finding
Triangulation ranging to a point with two or more projected...
C356S004050, C356S614000, C356S623000, C355S067000
Reexamination Certificate
active
07119886
ABSTRACT:
In a lithographic projection apparatus, a measuring system configured to measure the position of the projection system relative to a reference frame includes sensors rigidly mounted in relation to counterpart sensors of a measuring system measuring the substrate table position. An angular encoder which sends light from a target down two optical paths having opposite sensitivities to tilt is used to measure rotation of the projection system about its optical axis.
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Leenders Martinus Hendrikus Antonius
Meijer Hendricus Johannes Maria
Renkens Michael Jozef Mathijs
Ruijl Theo Anjes Maria
Van Der Pasch Engelbertus Antonius Fransiscus
ASML Netherlands B.V.
Fuller Rodney
Nelson Vivian
Pillsbury Winthrop Shaw & Pittman LLP
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