Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate
2011-05-10
2011-05-10
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
By alignment in lateral direction
With light detector
C356S401000, C356S614000, C355S053000
Reexamination Certificate
active
07940392
ABSTRACT:
The X, Y and Rz positions of a mask stage are measured using two optical encoder-reading heads measuring displacements of respective grid gratings mounted on the mask stage. The grid gratings are preferably provided on cut-away portions of the mask table so as to be coplanar with the pattern on the mask itself. Measurements of the table position in the other degrees of freedom can be measured with capacitive or optical height sensors.
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ASML Netherlands B.V.
Chowdhury Tarifur
Sterne, Kessler, Goldstein & Fox P.L.L.C
Stock, Jr. Gordon J
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