Lithographic apparatus, device manufacturing method, and...

Details Lithographic apparatus, device manufacturing method, and... Lithographic apparatus, device manufacturing method, and...

2006-09-05

2006-09-05

Perkey, W. B. (Department: 2851)

Optics: measuring and testing

By alignment in lateral direction

C355S077000, C250S492200

Reexamination Certificate

active

07102748

ABSTRACT:
A lithographic production process according to one embodiment comprises an input section, pre-imaging processes, measurement of a substrate, exposure of the substrate, post-imaging processes, and output. A controller controls the time spent processing in the scanner based on an input of the rate at which substrates arrive from the pre-imaging processes. This control allows the scanner to optimize the accuracy of devices produced by selectively varying the duration of processes in the scanner.

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