Method of and apparatus for detecting defect on photomask

Method of and apparatus for detecting foreign substance

Method of and apparatus for detecting foreign substances

Method of and apparatus for detecting foreign substances

Method of and apparatus for inspecting reticle for defects

Method of and apparatus for inspecting surface defects

Method of and inspecting apertured mask sheets

Method of calibrating scanners and arrangement for producing def

Method of detecting crack and chip in flange of syringe

Method of detecting flaws on the surface of metal

Method of detecting foreign objects for display panel...

Method of detecting the position and the content of fine foreign

Method of establishing thresholds for image comparison

Method of examining film quality of a membranal material and an

Method of high speed, high detection sensitivity inspection of r

Method of identifying defective picture element in image-wise ex

Method of inspecting magnetic disk surface

Method of inspecting microscopic surface defects

Method of inspecting particles on wafers

Method of inspecting the surface of an object and apparatus ther