4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Having predetermined light transmission regions
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Wafer inspection method and apparatus using diffracted light

Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent

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Window defect planar mapping technique

Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent

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Wound web roll sidewall quality measurement

Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent

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