Method of calibrating scanners and arrangement for producing def

Details Method of calibrating scanners and arrangement for producing def Method of calibrating scanners and arrangement for producing def

1990-05-21

1992-04-28

McGraw, Vincent P.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356243, G01N 2188

Patent

active

051081768

ABSTRACT:
Calibration of a light scanner, particularly for measuring particles and surface finishes in the inspection of substrates uses a strongly scattering reference medium. A focused laser beam is directed onto the reference medium which is disposed outside the focal plane of the beam. Scattered light from the medium is thus defocused with respect to a photodetector that collects the scattered light. An amplifier connected to the photodetector measures the intensity of the scattered light. By the use of filters in the path of the light calibration of the optico-electronic system of the scanner is achieved.

REFERENCES:
patent: 4776693 (1988-10-01), Imamura et al.
patent: 4966457 (1990-10-01), Hayano et al.

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