Method of detecting the position and the content of fine foreign

Details Method of detecting the position and the content of fine foreign Method of detecting the position and the content of fine foreign

1997-06-02

1998-02-03

Font, Frank G.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356375, 25055941, 25055945, G01N 2100, G01B 1114

Patent

active

057150524

ABSTRACT:
Methods wherein a partial region of a fine foreign matter which is detected first in a particle counter is detected again, observed, analyzed and evaluated by irradiating a spot of beam light to the region, observing a scattered light from a dark field or a dark part in the spot from a blight field, a coordinate of the analyzer being linked with a coordinate of the partial counter and registered in the analyzer. Thereby semiconductor devices or liquid crystal display devices are inspected accurately and immediately.

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