Method of inspecting the surface of an object and apparatus ther

Details Method of inspecting the surface of an object and apparatus ther Method of inspecting the surface of an object and apparatus ther

1979-01-23

1982-08-03

Dixon, Harold A.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356239, 356369, G01M 2132

Patent

active

043425151

ABSTRACT:
This invention discloses inspection apparatus for detecting unfavorable foreign matters existent on the surface of an object such as semiconductor wafer. The apparatus includes a collimated beam generator portion which projects a collimated beam towards the object to-be-inspected from a side thereof, and a mechanism which senses light reflected from the surface of the object, through a polarizer plate. In accordance with this invention, the signal-to-noise ratio between a detection signal generated by a pattern of the foreign matter to-be-detected and a signal generated by a normal pattern of the object surface and sensed as a noise component can be enhanced.

REFERENCES:
patent: 2947212 (1960-08-01), Woods
patent: 3972619 (1976-08-01), Stevens
patent: 4020695 (1977-05-01), Roney

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