Method of inspecting microscopic surface defects

Details Method of inspecting microscopic surface defects Method of inspecting microscopic surface defects

1982-02-09

1984-05-22

Sikes, William L.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

250562, 250572, 356371, 358106, G01N 2100

Patent

active

044498187

ABSTRACT:
A method is provided for inspecting defects in the surface of an object to be inspected, wherein oblique lighting and perpendicular lighting are alternately applied to a location where a defect or a foreign substance possibly exists. Brightness detected in the location under the application of oblique lighting is evaluated as a foreign substance so as to be discriminated from a defect. Defects are classified through shape recognition of a defect pattern obtained under the application of perpendicular lighting.

REFERENCES:
Sommer et al., "Detection and Measurement of Epitaxial Spikes", IBM Tech. Disclo. Bull., vol. 13, No. 11, p. 3496, Apr. 1971.
Flamholz et al., "Scratch and Line Defect Detection System . . . ", IBM Tech. Disclo. Bull., vol. 20, No. 1, pp. 170-173, Jun. 1977.
Grosewald et al., "Automatic Detection of Defects on Wafers", IBM Tech. Disclo. Bull., vol. 21, No. 6, pp. 2336-2337, Nov. 1978.

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