Method of and apparatus for detecting foreign substances

Details Method of and apparatus for detecting foreign substances Method of and apparatus for detecting foreign substances

1985-10-28

1988-04-26

LaRoche, Eugene R.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

250572, 358199, G01N 2101

Patent

active

047400790

ABSTRACT:
The present invention provides a method for detecting foreign substances which detects a foreign substance with a first photoelectric conversion element by emphasizing the foreign substance and detects a background on the object with a second photoelectric conversion element by emphasizing the background and detects a foreign substance detection signal obtained from the first photoelectric conversion element by emphasizing the signal with a detection signal obtained from the second photoelectric conversion element.

REFERENCES:
patent: 4286293 (1981-08-01), Jablonowski
patent: 4441124 (1984-04-01), Heebner et al.

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