Method of identifying defective picture element in image-wise ex

Details Method of identifying defective picture element in image-wise ex Method of identifying defective picture element in image-wise ex

1997-05-30

1998-05-19

Pham, Hoa Q.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356447, G01N 2100

Patent

active

057542864

ABSTRACT:
In an image-wise exposure apparatus, a mirror array device includes a plurality of small mirrors which are two-dimensionally arrayed and are movable between ON-positions where each of the small mirrors reflects light impinging thereupon along an operative optical path so that the reflected light impinges upon a photosensitive material and OFF-positions where each of the small mirrors reflects light impinging thereupon along an inoperative optical path so that the reflected light does not impinge upon the photosensitive material. An initializing image signal which intends to cause all the small mirrors of the mirror array device to be set in the respective OFF-positions is input into the mirror array device, and an initial amount of light on the operative optical path at the time the initializing image signal is input into the control circuit is measured. Then a series of checking image signals which intend to cause the small mirrors to be set in the respective ON-positions one by one are input into the mirror array device in sequence. When the amount of light on the operative optical path is held substantially equal to the initial amount of the light upon input of a checking image signal, a small mirror corresponding to the checking image signal is identified as a defective one.

REFERENCES:
patent: 4691106 (1987-09-01), Hyun et al.
patent: 5187539 (1993-02-01), Adachi et al.

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