Method of and apparatus for inspecting surface defects

Details Method of and apparatus for inspecting surface defects Method of and apparatus for inspecting surface defects

1991-02-20

1992-08-04

Rosenberger, Richard A.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

250563, G01N 2189

Patent

active

051353032

ABSTRACT:
The present invention relates to a method of inspecting a defect on a surface of a test piece, and to an apparatus using this method. The method comprises the steps of dividing the surface of the test piece into a plurality of inspection regions so as to detect image signals from said plurality of inspection regions thus divided; measuring feature values of background levels from image signals detected at divided inspection regions adjacent to the plurality of inspection regions thus divided; and representing the image signals detected at the adjacent divided inspection regions in binary form on the basis of threshold values set based on the measured feature values, thereby detecting fine defects on the surface of the test piece based on the image signals represented in binary form.

REFERENCES:
patent: 3920970 (1975-11-01), Slaker
patent: 4626101 (1986-12-01), Ogawa et al.
patent: 4674875 (1987-06-01), Koizumi
patent: 4768878 (1988-09-01), Heine et al.
patent: 4954723 (1990-09-01), Takahashi et al.

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