Search routine for ellipsometers

Details Search routine for ellipsometers Search routine for ellipsometers

1991-08-30

1995-04-25

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

Of surface reflection

356376, 356382, G01J 400

Patent

active

054104092

ABSTRACT:
A method of locating a predetermined variation in the surface of a film such as selected depression or elevation on a film deposited on a surface and for measuring the depth of the depression or height of the elevation comprising the steps of establishing a datum plane based on the average level of the surface of the film, scanning the surface of the film with a laser beam until a predetermined variation from said datum plane is located, on the surface of the film, incrementally stepping the laser beam around and across the located variation, measuring the beam reflected at various points along the variation to determine the contour of the variation by establishing the slope of the variation between various measurements, establishing the apex of an elevation or bottom of a depression by determining when the measured slope goes to zero, and measuring the height of the established apex or depth of the established bottom of the depression with respect to the established datum plane of the film.

REFERENCES:
patent: 4627734 (1986-12-01), Rioux
patent: 4695162 (1987-09-01), Itonaga et al.
Niven, Ivan. Calculus, An Introductory Approach, D. Van Nostrand Company, Inc. Princeton, N.J. copyright 1961, pp. 1-3, 90-96.

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