Optics: measuring and testing – By polarized light examination – Of surface reflection
Patent
1994-08-02
1995-05-16
Pham, Hoa Q.
Optics: measuring and testing
By polarized light examination
Of surface reflection
250225, G01N 2121
Patent
active
054165881
ABSTRACT:
In an ellipsometer, a phase-modulated, polarized light beam is applied to a sample, electrical signals are obtained representing the orthogonal planes of polarization of the light after it has interacted with the sample and the constants of the sample are calculated from the two resulting electrical signals. The phase modulation is sufficiently small so that the calibration errors are negligible. For this purpose, the phase modulator phase modulates the light within a range of no more than ten degrees modulations peak to peak. The two electrical signals are expanded by Fourier analysis and the coefficients thereof utilized to calculate psi and delta.
REFERENCES:
patent: 3594085 (1971-07-01), Wilmanns
patent: 3734625 (1973-05-01), Aagard
patent: 3981587 (1976-09-01), Gievers
patent: 4053232 (1977-10-01), Dill et al.
patent: 4306809 (1981-12-01), Azzam
patent: 4585348 (1986-04-01), Chastang et al.
patent: 4872758 (1989-10-01), Miyazaki et al.
patent: 4953980 (1990-09-01), DeVolk et al.
Ducharme Stephen P.
El Hajj Hassanayn M.
Johs Blaine D.
Woollam John A.
Carney Vincent L.
Pham Hoa Q.
The Board of Regents of the University of Nebraska
LandOfFree
Small modulation ellipsometry does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Small modulation ellipsometry, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Small modulation ellipsometry will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-641962