Self-calibrating beam profile ellipsometer

Details Self-calibrating beam profile ellipsometer Self-calibrating beam profile ellipsometer

2006-05-30

2006-05-30

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

07054006

ABSTRACT:
A real-time calibration method for beam profile ellipsometry systems includes projecting an electromagnetic probe beam having a known polarization state though an objective lens onto the surface of a subject and collecting the reflected probe beam using the same objective. The reflected probe beam is then passed through a rotating compensator and analyzer before being received by a detector. A processor performs a harmonic analysis on the detector output to determine normalized Fourier coefficients. The processor uses Fourier coefficients to measure the retardation δBand the azimuth angle QBof the objective lens; and uses the retardation δBand the azimuth angle QBto identify the ellipsometric effects of the objective lens.

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