Simultaneous multiple angle/multiple wavelength ellipsometer and

Details Simultaneous multiple angle/multiple wavelength ellipsometer and Simultaneous multiple angle/multiple wavelength ellipsometer and

1990-01-11

1992-11-24

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

Of surface reflection

356367, 2502012, G01J 400

Patent

active

051667525

ABSTRACT:
The ellipsometer and method involve directing polarized light for interaction with an optical system under study at different angles of incidence from a single beam of light and detecting the light interacted with the optical system by reflection and/or transmission for each of a plurality of different angles of incidence. The simultaneous illumination of the optical system under study at a whole range of angles of incidence from a single beam of light and the collection a large multiplicity of data from the different angles detected can be accomplished rapidly and easily and with accuracy without scanning and with only one ellipsometer. A lens is used to focus the incoming light to provide the range of different angles of incidence. The range of angles is at least one or two degrees and preferably thirty degrees or more. A second lens refocuses the interacted light to a linear, multi-element detector array which extends in the plane of the incidence. Each of the detector elements detects a narrow range of angles of incidence within the relatively wider range of angles of incidence of the illuminating beam. If the incident illuminating rays are polychromatic and a wavelength dispersing element acts on the reflected rays each detector element of a square array detects a narrow range of wavelengths and angles of incidence.

REFERENCES:
patent: 4030836 (1977-06-01), Smith
patent: 4052666 (1977-10-01), Fletcher et al.
patent: 4053232 (1977-10-01), Dill et al.
patent: 4077720 (1978-03-01), Kasai
patent: 4434025 (1984-02-01), Robillard
patent: 4472633 (1984-09-01), Motooka
patent: 4516855 (1985-05-01), Korth
patent: 4585348 (1984-04-01), Chastang et al.
patent: 4647207 (1987-03-01), Bjork et al.
patent: 4653924 (1987-03-01), Itonaga et al.
patent: 4655595 (1987-04-01), Bjork et al.
patent: 4672196 (1987-06-01), Canino
patent: 4686360 (1987-08-01), Gorgon
patent: 4725145 (1988-02-01), Azzam
patent: 4834539 (1989-05-01), LeBris et al.
patent: 4837603 (1989-06-01), Hayashi
patent: 4838695 (1989-06-01), Mansuripur et al.
patent: 4850711 (1989-07-01), Sano et al.
patent: 4866264 (1989-09-01), Biricik et al.
patent: 4957368 (1990-09-01), Smith
patent: 4999014 (1991-03-01), Gold et al.

Affiliated with

Also associated with

Rating

Simultaneous multiple angle/multiple wavelength ellipsometer and does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Simultaneous multiple angle/multiple wavelength ellipsometer and, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Simultaneous multiple angle/multiple wavelength ellipsometer and will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-925797