Adjustable beam alignment compensator/retarder with application

Details Adjustable beam alignment compensator/retarder with application Adjustable beam alignment compensator/retarder with application

1999-02-08

2000-07-04

Pham, Hoa Q.

Optics: measuring and testing

By polarized light examination

Of surface reflection

359496, G01J 400

Patent

active

060846755

ABSTRACT:
Disclosed is a compensator/retarder system which allows adjustment to eliminate introduction of significant deviation and/or displacement into the propagation direction of a beam of electromagnetic radiation caused to interact therewith, even when the present invention retarder system is caused to continuously rotate in a rotating compensator ellipsometer system. Also disclosed is a method of calibration of an ellipsometer/polarimeter system which includes a present invention compensator/retarder system.

REFERENCES:
patent: 0548495 (1895-10-01), Abbe
patent: 2447828 (1948-08-01), West
patent: 3514182 (1970-05-01), Banks
patent: 3817624 (1974-06-01), Martin
patent: 4053232 (1977-10-01), Dill et al.
patent: 4556292 (1985-12-01), Mathyssek et al.
patent: 4668086 (1987-05-01), Redner
patent: 5016980 (1991-05-01), Waldron
patent: 5329357 (1994-07-01), Bernoux et al.
patent: 5373359 (1994-12-01), Woollam et al.
patent: 5475525 (1995-12-01), Tournois et al.
patent: 5504582 (1996-04-01), Johs et al.
patent: 5521706 (1996-05-01), Green et al.
patent: 5581350 (1996-12-01), Chen et al.
patent: 5596406 (1997-01-01), Rosencwaig et al.
Regression Calibration Method for Rotating Element Ellipsometers, Johs, Thin Film Solids, 234 (1993).
Data Analysis for Spectroscopic Ellipsometry, Jellison Jr., Thin Film Solids, 234 (1993).
Automated Rotating Element Ellipsometer: Calibration, Operation, & Peal Time Applications, Collins, Rev. Sci. Instrum. 61(8) (Aug. 1990).

Affiliated with

Also associated with

Rating

Adjustable beam alignment compensator/retarder with application does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Adjustable beam alignment compensator/retarder with application , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Adjustable beam alignment compensator/retarder with application will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1491400