Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2007-02-27
2007-02-27
Nguyen, Tu T. (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
Reexamination Certificate
active
10518121
ABSTRACT:
Disclosed is an achromatic spectroscopic ellispometer for analyzing small regions of a sample over a wide range of wavelengths from ultraviolet (UV) to infrared (IR). The spectroscopic ellipsometer contains a light source emitting a light beam which passes through a polarisation state generator section before being focused at an incidence angle q by a first parabolic mirror to a small spot on a sample. A second parabolic mirror collects the reflected beam and connects said beam to an analyzing section. The reflected beam emerges from the analyzing section and is spectroscopically detected and analyzed. The light beam through the polarisation state generator section up to the first parabolic mirror and the light beam from the second mirror through the analyzing section are parallel enabling achromatism. The incidence angle q is largely varied without shifting of the location of the small spot on the sample surface.
REFERENCES:
patent: 4210401 (1980-07-01), Batten
patent: 5910842 (1999-06-01), Piwonka-Corle et al.
patent: 6804003 (2004-10-01), Wang et al.
patent: 6804004 (2004-10-01), Johs et al.
patent: 2002/0191185 (2002-12-01), Rotter et al.
PCT/EP03/06316 International Search Report.
XP000237482 2219 Applied Optics 30 Nov. 1, 1991. No. 31 New York, US, pp. 4471-4473.
Amary Pascal
Benferhat Ramdane
Bos Francis
Cattelan Denis
Brown Rudnick Berlack & Israels LLP
Handal, Esq. Anthony H.
Horiba Jobin Yvon Inc.
Nguyen Tu T.
LandOfFree
Achromatic spectroscopic ellipsometer with high spatial... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Achromatic spectroscopic ellipsometer with high spatial..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Achromatic spectroscopic ellipsometer with high spatial... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3830580