Achromatic spectroscopic ellipsometer with high spatial...

Optics: measuring and testing – By polarized light examination – Of surface reflection

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

Reexamination Certificate

active

10518121

ABSTRACT:
Disclosed is an achromatic spectroscopic ellispometer for analyzing small regions of a sample over a wide range of wavelengths from ultraviolet (UV) to infrared (IR). The spectroscopic ellipsometer contains a light source emitting a light beam which passes through a polarisation state generator section before being focused at an incidence angle q by a first parabolic mirror to a small spot on a sample. A second parabolic mirror collects the reflected beam and connects said beam to an analyzing section. The reflected beam emerges from the analyzing section and is spectroscopically detected and analyzed. The light beam through the polarisation state generator section up to the first parabolic mirror and the light beam from the second mirror through the analyzing section are parallel enabling achromatism. The incidence angle q is largely varied without shifting of the location of the small spot on the sample surface.

REFERENCES:
patent: 4210401 (1980-07-01), Batten
patent: 5910842 (1999-06-01), Piwonka-Corle et al.
patent: 6804003 (2004-10-01), Wang et al.
patent: 6804004 (2004-10-01), Johs et al.
patent: 2002/0191185 (2002-12-01), Rotter et al.
PCT/EP03/06316 International Search Report.
XP000237482 2219 Applied Optics 30 Nov. 1, 1991. No. 31 New York, US, pp. 4471-4473.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Achromatic spectroscopic ellipsometer with high spatial... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Achromatic spectroscopic ellipsometer with high spatial..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Achromatic spectroscopic ellipsometer with high spatial... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3830580

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.