Optics: measuring and testing – By polarized light examination – Of surface reflection
Patent
1994-02-08
1995-09-12
Pham, Hoa Q.
Optics: measuring and testing
By polarized light examination
Of surface reflection
G01N 2121
Patent
active
054502012
ABSTRACT:
Apparatus for optically inspecting an article, includes an illuminating system, an imaging system, and portable polarizing devices including a polarizer in the illuminating system, an analyzer in the imaging system, and a phase compensator in one of the systems. The illuminating system directs the light from the light source to the objective lens along an axis which is parallel to, but is laterally displaced from, the axis of the objective lens, such as to illuminate the inspected article with a cone of light which is tilted at an angle relative to the axis of the objective lens to thereby permit contrast enhancement of the illuminated inspected article by the null-ellipsometric effect.
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Finarov Moshe
Katzir Yigal
Orbotech Ltd.
Pham Hoa Q.
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