Alignment of ellipsometer beam to sample surface

Details Alignment of ellipsometer beam to sample surface Alignment of ellipsometer beam to sample surface

2006-11-14

2006-11-14

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

07136162

ABSTRACT:
Disclosed is a system and method of aligning, preferably by an automated procedure, a beam of electromagnetic radiation provided by a source thereof so that it approaches a sample at a specific location upon its surface, at a known angle, then reflects therefrom and enters a data detector.

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