Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2005-06-29
2009-11-10
Turner, Samuel A (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
Reexamination Certificate
active
07616312
ABSTRACT:
An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.
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Boiadjieva Nina
Ispasoiu Radu
Kasapi Steven
Lo William
Nataraj Nagamani
Bach, Esq. Joseph
DCG Systems, Inc.
Nixon & Peabody LLP
Turner Samuel A
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