LandOfFree - US Patents - Listing for Optics: measuring and testing,By alignment in lateral direction,With registration indicia

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Article of manufacture bearing a universal alignment target

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Autofocus system

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Calibrating a lithographic apparatus

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Calibration wafer for a stepper

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

CCD based confocal filtering for improved accuracy in x-ray prox

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Clearance measuring device and method for exposure

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Code reading device and method with light passing through...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Combined segmented and nonsegmented bar-in-bar targets

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Continuously varying offset mark and methods of determining...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Cross-mask holder device

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Dark field target design system for alignment of semiconductor w

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Detection optical system for detecting a pattern on an object

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Device for aligning substrate with mask and method using the...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Device for supporting linearly moving a movable member and a con

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Diffracting, aperiodic targets for overlay metrology and...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Direct reticle to wafer alignment using fluorescence for integra

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Double sided wafer, alignment technique

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Double-sided circuit board exposure machine and method with opti

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Edge overlay measurement target for sub-0.5 micron ground rules