Detection optical system for detecting a pattern on an object

Details Detection optical system for detecting a pattern on an object Detection optical system for detecting a pattern on an object

1990-09-05

1991-09-17

Scott, Jr., Leon

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

356400, 356237, 356394, G01B 1100

Patent

active

050489674

ABSTRACT:
A detection optical system for detecting a pattern on the surface of an object includes an illumination device for illuminating the surface of the object with a light beam, a scanning system cooperable with the illumination device to scan the surface of the object with the light beam, and an optical arrangement for receiving light from each point on the surface of the object scanningly illuminated with the light beam by the cooperation of the illumination device and the scanning system. The optical arrangement is effective to form an image of a light spot, formed by the light beam upon the surface of the object. The optical arrangement includes a stop member disposed at a position whereat the image of the light spot is formed. The stop member has an aperture of a size substantially the same as, or not greater than, that of the image of the light spot, wherein the pattern on the surface of the object is detected on the basis of light passed through the stop member.

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